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Multi probe system
4X4 Matrix
Multi-pin Mini-probe card
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The QualiTau Multi-Site Probe system is not just a probe card, but a complete probing solution testing 10s to 100s of DUTs simultaneously. It includes the probe station, anti-vibration table, light tight enclosure, digital camera with high powered optics, optional vacuum hot chuck, multiple-pin mini-probe cards, and QualiTau's patented technique of placing multiple probe cards across the surface of a wafer. This technique provides the positioners with multi-dimensional alignment control including global X, Y, Z and Theta adjustment on the chuck, X and Y adjustments on the rails, and X, Y, and Z fine adjustments on each positioner head.
Each Y-axis rail is designed to flip up to allow easy access to the probe cards for removal or replacement. Each mini-probe card can have up to 40 probe pins arranged in one or two rows. The Infinity style card has driven guard and sense lines all the way to the pin connection on the card. The 8" wafer solution can accommodate 9 probe cards which means it can put up to 360 pins on the wafer at the same time. The 12" system can have 16 probe cards for a total up to 640 pins.
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