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 HC Graph Click to enlarge
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Electromigration
TDDB
Hot Carrier
Temperature environment
Additional benefits
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Three basic Hot Carrier (HC) modules - Room Temperature (RT), Temperature Controlled (HCT), and Bipolar HC (Bip-HC) - along with various other application options, are offered with the MIRA system. Each module allows for both Forward and Reverse I/V measurement capability.
The Room Temperature HC module allows for stressing of 72 DUTs in 24 packages and for three additional reference devices per package. The use of reference devices is optional and can be used for temperature compensation, L (Length), and W (Width) effective measurements.
Different voltage options are available for the RT HC module: Vd10/Vg10, Vd20/Vg20, and 40 Volt (NMOS or PMOS specific module).
The HC Temperature Controlled (HCT) module allows for stressing 60 DUTs or can be used to stress 30 DUTs with 30 Reference Devices and can be used with an oven for hot or cold (with LN2) temperature control. The HCT module is offered as a 15 Volt or 30 Volt option.
The Bipolar HC (Bip-HC) module has 90 sources to support the stressing of 30 bipolar transistors and can be used with an oven for temperature control. The Bip-HC module is offered as a 15 Volt module with independent sources for Collector, Base, Emitter, and common Bulk.
AC HC Software (for RT HC module only): This software can be used with your current (or a new) Hot Carrier module. It utilizes the customer's "on-chip" ring oscillator to stress one device per package in an AC mode. Please see the QualiTau Tech Note titled "Reliability testing using "on-chip" high frequency generators" for more details.
Charge Pumping (for RT HC wafer level module only): Ultra thin gate dielectric and sub-micron channel lengths have turned charge pumping into a needed tool for technology development. Up to eight transistors are simultaneously driven into charge pumping mode, with the Drain and Bulk being biased under user defined DC conditions. The charge pumping pulse is provided by a commercial-grade pulse generator, featuring frequency, duty cycle and DC offset control. The Pulse Amplitude can go up to 15 V with duty cycle range of 10% to 90% and Frequency range up to 3 MHz.
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