Vision
Management Team
World wide offices
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 Electromigration
TDDB
Hot Carrier
Temperature environment
Additional benefits
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Additional benefits of the MIRA system Wafer level interfaces, both hardware and software, are available for either a massively parallel approach with QualiTau.s Multi-Site Probe System or for a few DUTs per site, stepping type, approach with an automatic or semi-automatic prober. 19-Inch Rack: The MIRA, including 4 modules and 2 Standard capacity ovens (or 4 Mini-Ovens), fits conveniently into the small footprint of a 19-inch rack. Alternatively, an additional rack can be utilized if 4 Standard ovens are ordered with a single MIRA. Unmatched low voltage measurements: The QualiTau system uses a high quality meter to measure the voltage or current on the DUT. This meter, combined with the unique design of our system, results in measurement accuracy and resolution that are unmatched in the industry. In Electromigration, this capability is useful for the TCR measurements where a low current is used and is highly useful when testing low resistance test structures (wide metal lines and single vias). Please see the QualiTau Tech Note titled "Resistance Measurements in Electromigration: Resolution / Accuracy Benchmark" for more details. Automatic calibration of sources: The QualiTau system automatically calibrates each source before every test with reference to the meter. Therefore, the accuracy of the stress current or voltage will not change from test to test. Also, the meter can be removed and calibrated to ISO or any other standard. Unlimited DUT pin assignments: QualiTau uses a mini-jumper design for DUT connectivity. This means that customers can bond out their devices to any pins on the package and the system can be configured to make the appropriate connections. Dual computer design: The QualiTau system uses two computers so that the tasks of test set-up and data analysis can be separated from the tasks of experiment control and data acquisition. The test set-up and data analysis runs on a Workstation computer running the latest Windows software. The experiment control and data acquisition runs on the MIRA controller running DOS-based software for added stability. By using two computers, the data of an ongoing experiment can be analyzed at any time while experiments are running. The safety of the experiment data is also enhanced since all data is stored and accessible on the hard drives of both computers and can be backed-up on a CD drive. UPS (Uninteruptable Power Supply): The MIRA mainframe controller is equipped with a powerful, built-in UPS. When a power failure is detected, the UPS allows for a controlled test shut down so that all data can be time-stamped and saved and the devices are allowed a controlled relaxation. When power is restored, the test can be resumed at the exact point it was interrupted without loss of data or damage to the devices under test. Real-time data analysis: The QualiTau system provides a turnkey solution where data analysis is not an afterthought but an integral part of the system. Full-color Data Analysis graphs are available at the click of the mouse and each graph shows all devices in relation to each other. Additionally, data from previous experiments can be merged into the current analysis for multi-stress and multi-temperature analysis. RES-Q (Remote Expert Support - by QualiTau): RES-Q is a standard part of every MIRA system. By utilizing the software and the modem in the workstation computer, our service and applications engineers can immediately see what you see on your system, but only if you allow them. This has proven to be a useful tool for our applications engineers when assisting customers with their data analysis and test set-up.
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