Qualitau - Ace

EM or BTS Full AC Version: Electromigration and TDDB / BTS effects on semiconductor devices used under AC conditions have typically been approximated using "corrected" results from DC testing. However, the ever-increasing miniaturization of components and the need to question the traditional DC to AC correction factors has produced a growing demand for advanced testing tools and techniques that more closely simulate "real-world" degradation of devices used under AC conditions. To meet this demand, QualiTau has developed two full AC versions of the ACE for either pulsed electromigration or pulsed TDDB / BTS testing.

EM or BTS DC Only Version: At QualiTau, we recognize that not every semiconductor manufacturer has the need for multiple, large capacity, reliability test systems. Some manufacturers only need to verify or qualify one or two new processes a year to prove their device reliability to their customers. The DC only version of the ACE was designed specifically for this purpose.

The ACE system is made up of four modules, each with eight sockets, for a total of 32 single-socket ovens. With two sources per oven for EM and up to 4 sources per oven for TDDB / BTS, the ACE system can test up to 64 or 128 DUTs in DC and unipolar pulse modes and up to 32 or 64 DUTs in bipolar pulse mode. Each 28 pin ZIF (Zero-Insertion-Force) socket actually forms its own oven system with a built in heater and thermocouple resulting in excellent temperature stability and accuracy up to 350C. The ACE can support any bonding diagram with it's mini-jumper style connectivity matrixes. A built in controller and a separate workstation controller, each with easy-to-use software, provide convenient test setup and advanced data analysis. With all these independent controls built into the system, the user gets maximum test setup flexibility and very efficient test throughput.